Invited Speakers
Tutorial
- Tsuyoshi Moriya (Tokyo Electron)
“Innovation of Semiconductor Manufacturing Equipment by Intelligent control”
Plenary Talks
- Daiju Nakano (IBM Research – Tokyo)
“The First Quantum Computer Installed in Japan” - Shinichi Takagi (Univ. of Tokyo)
“Channel Material and Device Technology for Advanced Logic CMOS” - Takashi Yunogami (Fine Processing Institute)
“Semiconductors Indispensable for Human Civilization -2050 Global Semiconductor Market Forecast-“
Invited Talks
- Hirokazu Fukidome (Tohoku Univ.)
“Development and Exploring Physics of Low Environmental Load Beyond 5G Devices Using SiC as a Platform” - Masaya Kawano (Univ. of Tokyo)
“Advanced 3D Stacking Technology for High Density Heterogeneous Integration” - Koji Kita (Univ. of Tokyo)
“Material Sciences in SiC MOS Interface Formation through Surface Oxidation and Surface Nitridation Reactions” - Masaharu Kobayashi (Univ. of Tokyo)
“3D Integrated Memory Devices Enabled by Oxide Semiconductor” - Kosuke Nagashio (Univ. of Tokyo)
” Toward Novel Functional Devices Based on 2D Layered Materials” - Takashi Nakayama (Chiba Univ.)
“Stabilization of Ferroelectric Orthorhombic HfO2: First-Principles Calculation View” - Tetsuo Narita (Toyota Central R&D Labs.)
“Progress on and Challenges of GaN Power MOSFETs using AlSiO gate oxides”
Special Invited Talk
- Roger Loo (imec)
“Epitaxial Ge Virtual Substrates and Ge-on-Nothing on Si: Comparison of Material Properties”
Rump Session
“Present and Future Prospects of Semiconductor Electronics Industry and Engineering”
Panelist：
- Manabu Tsujimura (EBARA)
- Kenji Tateiwa (Tower Partners Semiconductor)
- Nahomi Aoto (Micron Memory Japan, K.K.)
- Hiroomi Eguchi (MIRISE Technologies)